基本信息

主要从事等离子体放电物理、装备以及工艺研究，半导体装备与集成电路工艺的开发如等离子体刻蚀、沉积与PVD镀膜的等离子体放电物理与工艺的研究开发，以及装备的设计开发等。此外拓展等离子体与材料相互作用的研究，如刻蚀与注入工艺制备催化剂的研究等。

教育 背景

2018/09-2021/10香港城市大学  Ph.D. 应用物理 (等离子体应用)

2011/09-2014/07 中科院等离子体所  M.S. 等离子体物理

2007/09-2011/07山东师范大学  B.S. 应用物理

工作背景

2022/05- 2024/06   松山湖材料实验室   博士后  

2021/08-2022/05 厦门三安集成电路有限公司  高级工程师

2014/07-2018/07北方华创微电子装备有限公司 射频技术leader

论文

1. Dezhi Xiao et al. “Modeling and experimental comparison of pulsed-DC driven low-pressure plasma discharge in a metal tube” , Current Applied Physics 61, 47-54, 2024.

2. Jin pengli, Dezhi Xiao*, et al. “Synergistically tailoring the distribution of precursor gas for uniform internal DLC coating of long tub”, Surface & Coatings Technology 466, 15, 2023.

3. Yu zheng Wu†, Dezhi Xiao† et al. “Nanostructured Conductive Polypyrrole for Antibacterial Components in Flexible Wearable Devices”, Research 6, 0074, (2023).

4. Dezhi Xiao, et al. “Experimental and theoretical investigation of the control and balance of active sites on oxygen plasma-functionalized MoSe₂ nanosheets for efficient hydrogen evolution reaction”, App. Catal. B-Environ. 288, 119983, (2021).  

5. Dezhi Xiao, et al. “Effects of Ion Energy and Density on the Plasma Etching-Induced Surface Area, Edge Electrical Field, and Multivacancies in MoSe₂ Nanosheets for Enhancement of the Hydrogen Evolution Reaction”, Small 25, 2001470, (2020).  

6. Dezhi Xiao, et al. “Atomic-Scale Intercalation of Graphene Layers into MoSe₂ Nanoflower Sheets as a Highly Efficient Catalyst for Hydrogen Evolution Reaction”, ACS Appl. Mater. Interfaces12, 2460-2468, (2020).  

7. Dezhi Xiao, et al.“Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation”, Surface & Coatings Technology 400, 126252, (2020).

8. Dezhi Xiao, et al. “Characteristics of atmospheric-pressure non-thermal N2 and N2/O2 gas mixture plasma jet”, Journal of Applied Physics, 115, 033303 (2014).

9. Dezhi Xiao, et al. “Electron density measurements of atmospheric-pressure non-thermal N-2 plasma jet by Stark broadening and irradiance intensity methods” PHYSICS OF PLASMAS, 21  053510 (2014). 

10. Dezhi Xiao, et al. “Effects of Atmospheric-Pressure Nonthermal Nitrogen and Air Plasma on Bacteria Inactivation”, IEEE Transactions on Plasma Science 44, 11 (2015)

11. Dan Li, et al., Dezhi Xiao, et al., Paul K. Chu, “Dynamic active sites on plasma engraved Ni hydroxide for enhanced electro-catalytic urea oxidation”, Journal of Energy Chemistry, 71, 150-158 (2022)

12. Ying Wang, Cheuk Kai Gary Kwok , Dezhi Xiao, et al., “ Improving the p–type conductivity of Cu2O thin films by Ni doping and their heterojunction with n–ZnO”, Applied Surface Science 590, 15, (2022) . 

13. Yang Luo,Yinghong Wu, Chao Huang,Dezhi Xiao, et al. “Graphite felt incorporated with MoS2/rGO for electrochemical detoxification of high-arsenic fly ash”, Chemical Engineering Journal, 15 122763, (2020).

14. Yang Luo, Yinghong Wu, Donghai Wu, Chao Huang, Dezhi Xiao, et al. “NiFe-Layered Double Hydroxide Synchronously Activated by Heterojunctions and Vacancies for the Oxygen Evolution Reaction”, ACS Appl. Mater. Interfaces, 12, 38, (2020).

15. Chao Huang, Biao Zhang,Yang Luo,Dezhi Xiao, et al., “A hybrid Co NPs@CNT nanocomposite as highly efficient electrocatalyst for oxygen evolution reaction”, Applied Surface Science 30 145155 (2020).

16. Yang Luo, Yinghong Wu, Dezhi Xiao, et al. Paul K .Chu, “Al2O3 coating for densification of SiC ceramics and sintering kinetics”, Surface & Coatings Technology 25 374 (2019).

17. Jun ZHANG, Dezhi XIAO, et al. “Characteristics of Low Power CH4/Air Atmospheric Pressure Plasma Jet”, PLASMA SCIENCE & TECHNOLOGY 17 202-208 (2015).

18. FeiFang, DezhiXiao, et al.“Construction of intumescent flame retardant and antimicrobial coating on cotton fabric via layer-by-layer assembly technology”,Surface & Coatings Technology25 726 (2015).

会议论文：

1. Dezhi Xiao and Paul K. Chu, “The Effects of Plasma-Induced Etching and Doping of MoSe₂ Catalyst for the Improvement of Electrochemical Activity”, 12th EU-Japan Joint Symposium on Plasma Processing (JSPP-12) and 15th Asia-Pacific Conference on Plasma Science and Technology (APCPST-15), Paper O-15, March 29 – April 2, 2021.

2. Dezhi Xiao and Paul K. Chu, “The Uniformity Improvement of GaN Etching by Simulation and Experiment”, Proceedings 15th International Conference on Plasma Based Ion Implantation & Deposition, Shenzhen, ID 100, pp. 186 – 188, December 19 – 22, 2019.

授权专利

1. 肖德志, 一种等离子体产生腔室和等离子体处理装置, 中国发明专利, 授权(2021.06.08).

2. 肖德志, 一种反应腔室和半导体加工装备, 中国发明专利, 授权(2022.07.19).

3. 肖德志,王建龙,腔室内衬、等离子体反应腔室和等离子体设备, 中国发明专利, 授权(2022.07.22).

4. 肖德志,琚里,反应腔室的磁场产生机构和反应腔室, 中国台湾发明专利, 授权(2019.06.01).

5. 肖德志,赵晋荣, 线上监测系统及半导体加工装置,中国台湾发明专利, 授权(2020.09.11).

主持项目

1. 脉冲空心阴极等离子体调控多孔载体上硒化钼表面效应及其析氢机理研究，国家自然科学基金-青年，12405292，2025-2027.

2. 高功率脉冲直流驱动管道等离子体放电模拟与诊断实验研究，电力设备电气绝缘国家重点实验室(西安交通大学) 开放课题，(EIPE23204), 2023-2024.

3. 超高功率密度脉冲阴极弧放电锂电负极材料快速等离子体碳包覆研究，广东省基础与应用基础研究基金项目， (2022A1515110219), 2022-2025.

4. 面向GaN器件的脉冲偏压调制等离子体浸没离子注入的实验与机理研究，博后面上，(2022M722304), 2022-2024.

获得荣誉

1. 东莞市特色人才,广东省海外博后,香港城市大学学费奖学金,北方华创优秀员工等.